We manufacture advanced heat treatment equipment for production of power semiconductors, (Si, SiC, GaN), organic EL (OLED), MEMS, and VCSEL, as well as for Packaging (Fan-Out WLP/PLP, Wafer Bump, others). Our product lineup covers heat treatments from a low-temperature range to 1850°C.

Vertical Furnace

Our flagship product. A broad lineup that ranges from experimental applications up to mass production with excellent temperature distribution and atmosphere control.

Applications : Semiconductor, SiC Power Semiconductor, MEMS, VCSEL, PV (Photovoltaic), FPD

Horizontal Furnace

Capable of vertically stacking up to 4 horizontal processing tubes. A general-purpose system that can utilize the installation area effectively.

Applications : Semiconductor, PV (Photovoltaic)

Lamp Annealing System

A single wafer system that enables excellent in-plane temperature uniformity. Automatic or manual finger selection is possible.

Applications : Semiconductor, SiC Power Semiconductor

Clean Oven Systems

An optimal convection heating system for polyimide post-processing (back end process) and resist curing.

Applications : Semiconductor, FPD

Large Bore Vertical Furnace

A large bore vertical furnace for semiconductors. Super clean processing for FPD applications is possible.

Applications : PV (Photovoltaic), FPD