Solution Cases

See various customer problems and their solutions.

• [case-011] CNT(Carbon nanotube) Growth System

  CNT(Carbon nanotube) growth system for large diameter wafers

  • Nitride, Oxynitride
  • VF-1000(H)

• [case-010] Improved Experimental and Development Accuracy

  Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments

  • Annealing
  • VF-1000(H)

• [case-009] Energy Saving of Vertical Furnace for Low Temperature Range

  Improvement of vertical furnace to energy saving by optimizing thermal insulation design

  • Polymide curing
  • VF-3000(B)