High-Temperature Inert Gas Oven INH Series
With this series, a high maximum operating temperature of 600℃ is available, together with a nitrogen (N2) atmosphere that yields low oxygen (O2) concentration of 20 ppm.
These products have been delivered in large quantities for degreasing of ceramic parts (*) and various anti-oxidation treatments.
The furnace external cooling mechanism using cooling blowers shortens the cooling time without affecting the atmosphere inside the furnace.
* Separate safety equipment is required. Please contact us from General Inquiries.
It is recommended that these products be used in combination with heater-type exhaust gas treatment equipment.
Features
- Based on our extensive record of success, this series enables a temperature of 600°C—the highest temperature for any anti-oxidation treatment equipment.
- N2 purge enables residual oxygen concentrations of 20 ppm or less.
- An external cooling system that uses cooling blowers shortens the cooling time.
- The oil seal and silicon seal maintain high airtightness and a water-cooling mechanism protects the seals from heat.
- Successfully used for a wide range of production including glass substrates and ceramic degreasing (*).
Specifications
| Model | INH-9N1 | INH-21CD | INH-51N2 | INH-100N2 |
|---|---|---|---|---|
| System | Forced circulation (side flow) | |||
| Max. operating temperature (*1) | 600°C | |||
| Normal operating temperature range (*1) | RT +60 to 600°C | |||
| Temperature profile accuracy (*2) | ±8°C (at 600°C), ±5°C (at 350°C) | |||
| Final oxygen concentration | 20 ppm or less | |||
| Time to reach max. temperature (Reference value) (*1) |
120 minutes or less (RT +60 to 600°C) |
90 minutes or less (RT +60 to 600°C) |
90 minutes or less (RT +60 to 600°C) |
|
| Time to reach 20 ppm | 50 minutes or less (N2 injection 50 L/min) |
60 minutes or less (N2 injection 90 L/min) |
90 minutes or less (N2 injection 250 L/min) |
90 minutes or less (N2 injection 250 L/min) |
| Temperature control | Programmer | Touch panel installed on program controller | ||
| Reading accuracy | Less than 500°C: ±0.5°C | ±0.3% FS±1 digit | ||
| 500°C or higher: ±(0.1% of displayed value) | Sampling frequency: 500 ms | |||
| Memory capacity | Total 1024 segments (max. 99 patterns) | 30 segments/program | ||
| Control operation | PID control with auto tuning | |||
| Cooling mechanism | External forced cooling mechanism | |||
| Heater output | 7.5 kW (at 200 V) | 12.0 kW (at 200 V) | 25.3 kW (at 200 V) | 44.3 kW (at 200 V) |
| Internal pressure gauge | 0 to 2 kPa | |||
| Thermocouple | K | |||
| External dimensions (mm) | 1105 (W) × 1650 (H) × 840 (D) | 1255 (W) × 1800 (H) × 1120 (D) | 1606 (W) × 1991 (H) × 1300 (D) | 1806 (W) × 2210 (H) × 2060 (D) |
| Internal dimensions (mm) | 450 (W) × 450 (H) × 450 (D) | 600 (W) × 600 (H) × 600 (D) | 800 (W) × 800 (H) × 800 (D) | 1000 (W) × 1000 (H) × 1000 (D) |
| Exhaust port size | 1B, ball valve stopper | 1.5B, ball valve stopper | ||
| Breaker capacity | AC 200 V, 30 A 3-phase, 50/60 Hz |
AC 200 V, 50 A 3-phase, 50/60 Hz |
AC 200 V, 175 A 3-phase, 50/60 Hz |
AC 200 V, 180 A 3-phase, 50/60 Hz |
| Shelf withstand load (uniformly distributed load) | 15 kg/shelf | |||
| Safety equipment | Leakage breaker, overheat prevention gauge, motor overload protector, control circuit protector | |||
| Accessories | 2 shelves (shelf holder), temperature recorder | 2 shelves (shelf holder), temperature recorder function (built into control system) |
Temperature recorder function (built into control system) |
|
| Applications | Annealing of electronic components, annealing of mounted substrates, debinding of MLCC and LTCC (*3), debinding of inductors (*3), degreasing of ceramics (*3), annealing of glass substrates, others | |||
(*1) Indicates the value at control points inside the heating chamber.
(*2) Effective dimensions INH-9, INH-21: 2/3 of internal dimensions; INH-51, INH-100: 4/5 of internal dimensions
(*3) Separate safety equipment is required. Please contact us from (link to Inquiries page).
☆ A coolant is required to protect the seal packing.
☆ The thermocouple is a consumable part.
