Search Results - Semiconductor Equipment

Multiple conditions can be selected when searching products.

Click one of the following two search options, and then select the search conditions.

Search by equipment type

Multiple conditions can be selected when searching products.
Select a search condition, and then click the Product Search button.

Wafer size

• φ300mm
• φ200mm
• Up to ⌀150mm
• 600×600mm
• 510×515mm
• 300×300mm
• Other

Maximum storage count

• 200 and above
• 150 to 100
• 75 to 25
• Single Wafer

Transfer system

• SMIF Pod opner
• Wafer (substrate)
• Cassette stocker
• FOUP opener
• FOUP stocker

* Only one maximum storage count can be selected. * Searches with multiple selections for other items are performed using an AND search.

Search by applications

Multiple conditions can be selected when searching products.
Select a search condition, and then click the Product Search button.

MEMS

• Thermal oxidation
• LPCVD

VCSEL

• Thermal oxidation
• Contact annealing
• Anneal

Semiconductor

• Annealing
• Thermal oxidation
• LPCVD
• Activated annealing
• Impurity diffusion
• Polyimide curing
• Gettering
• Sintering / Alloy

SiC Power Semiconductor

• LPCVD
• POA
• Contact annealing
• Activated annealing
• Thermal oxidation
• Nitriding / Oxynitriding

PV (Photovoltaic)

• Impurity diffusion
• Thermal oxidation

FPD

• Cure / Bake

Packaging

• Polyimide cure
• Bake

* Searches with multiple selections for any item are performed using an AND search.