High-Temperature Inert Gas Oven
With this series, a high maximum operating temperature of 600℃ is available, together with a nitrogen (N2) atmosphere that yields low oxygen (O2) concentration of 20 ppm.
These products have been delivered in large quantities for degreasing of ceramic parts (*) and various anti-oxidation treatments.
* Separate safety equipment is required. Please contact us from General Inquiries.
It is recommended that these products be used in combination with heater-type exhaust gas treatment equipment.
Features
- Based on our extensive record of success, this series enables a temperature of 600°C—the highest temperature for any anti-oxidation treatment equipment.
- The furnace external cooling mechanism using cooling blowers shortens the cooling time without affecting the atmosphere inside the furnace.
- The oil seal and silicon seal maintain high airtightness and a water-cooling mechanism protects the seals from heat.
Specifications
| Model | INH-9N1 | INH-21CD | INH-51N2 | INH-100N2 |
|---|---|---|---|---|
| System | Forced circulation (side flow) | |||
| Operation temperature (*1) | RT +60 to 600°C | |||
| Temperature profile accuracy (*2) | ±8°C (at 600°C), ±5°C (at 350°C) | |||
| Guaranteed O2 density | 20 ppm or less | |||
| Time to reach max. temperature (RT +60 to 592℃(600-8℃)) (*1) |
120 minutes or less | 90 minutes or less | ||
| Time to reach 20 ppm | 50 minutes or less (N2 injection 50 L/min) |
60 minutes or less (N2 injection 90 L/min) |
90 minutes or less (N2 injection 250 L/min) |
|
| Temperature control | Programmer | Touch panel installed on program controller | ||
| Reading accuracy | Less than 500°C: ±0.5°C | ±0.3% FS±1 digit | ||
| 500°C or higher: ±(0.1% of displayed value) | Sampling frequency: 500 ms | |||
| Memory capacity | Total 1024 segments (max. 99 patterns) | 30 segments/program | ||
| Control operation | PID control with auto tuning | |||
| Cooling mechanism | External forced cooling mechanism | |||
| Heater output | 7.5 kW (at 200 V) | 12.0 kW (at 200 V) | 25.3 kW (at 200 V) | 44.3 kW (at 200 V) |
| Internal pressure gauge | 0 to 2 kPa | |||
| Thermocouple | K | |||
| External dimensions | W1105 × H1650 × D840 mm | W1255 × H1800 × D1120 mm | W1606 × H1991 × D1299 mm | W1806 × H2210 × D2060 mm |
| Inner dimensions | W450 × H450 × D450 mm | W600 × H600 × D600 mm | W800 × H800 × D800 mm | W1000 × H1000 × D1000 mm |
| Exhaust port size | 1B, ball valve stopper | 1.5B, ball valve stopper | ||
| Breaker capacity | AC 200 V, 40 A 3-phase, 50/60 Hz |
AC 200 V, 50 A 3-phase, 50/60 Hz |
AC 200 V, 100 A 3-phase, 50/60 Hz |
AC 200 V, 175 A 3-phase, 50/60 Hz |
| Shelf withstand load (uniformly distributed load) | 15 kg/shelf | |||
| Safety equipment | Leakage breaker, overheat prevention gauge, motor overload protector, control circuit protector | |||
| Accessories | 2 shelves (shelf holder), temperature recorder | 2 shelves (shelf holder), temperature recorder function (built into control system) |
Temperature recorder function (built into control system) |
|
| Applications | Annealing of electronic components, annealing of mounted substrates, debinding of MLCC and LTCC (*3), debinding of inductors (*3), degreasing of ceramics (*3), annealing of glass substrates, others | |||
(*1) Indicates the value at control points inside the heating chamber.
(*2) Effective dimensions INH-9, INH-21: 2/3 of internal dimensions; INH-51, INH-100: 4/5 of internal dimensions
(*3) Separate safety equipment is required. The external dimensions of the furnace are different.
Please contact us from link to Inquiries page.
Please contact us from link to Inquiries page.
☆ A coolant is required to protect the seal packing.
☆ The thermocouple is a consumable part.
