AllFit Mesh Belt Type Continuous Furnace with Superheated Steam

This continuous furnace for mass production enables heat treatment under a superheated steam atmosphere.

Features

  • Shorter processing time is achieved by using superheated steam, which accelerates the debinding of ceramic components (e.g., MLCCs, LTCCs, electrostatic chucks) through hydrolysis of organic binders.
  • Shortening the process time can reduce energy and gas consumption.
  • Specifications such as belt width and heating / cooling lengths are determined according to process conditions, including temperature profile, throughput and other relevant factors.
  • Designed with anti-condensation measures for heat treatment under a superheated steam atmosphere.

Specifications

Model AF-47-MT
Operation temperature 400 to 1000°C
Available gases Superheated steam, N2, Air
Belt width Arranged according to process conditions, including heat profile, throughput and other relevant factors.
Clearance above the conveyor belt (Inlet/Outlet) Arranged according to process conditions, including heat profile, throughput and other relevant factors.
Zone configuration Arranged according to process conditions, including heat profile, throughput and other relevant factors.
Remaining O2 density (reference value) 20 ppm or less (when a muffle is filled with superheated steam.)
Note: May vary depending on the amount of dissolved oxygen in the supplied water.
Applications
  • Debinding and baking of electronic components (e.g.: MLCC, LTCC)
  • BBO (Binder burn out)
  • Debinding of ceramic parts
  • Drying and degreasing of metal parts
  • Removal of resin