AllFit Atmospheric Box Furnace with Superheated Steam

This batch furnace is designed for heat treatment under a superheated steam atmosphere and equipped with a muffle made of heat resistant metal alloy.

Features

Shorter processing time is achieved by using superheated steam, which accelerates the debinding of ceramic components (e.g., MLCCs, LTCCs, electrostatic chucks) through hydrolysis of organic binders.
Shortening the process time can reduce energy and gas consumption.
Heat treatment under a superheated steam atmosphere at temperatures up to 900℃ is possible with a muffle made of heat resistant metal alloy.
Designed with anti-condensation measures for heat treatment under a superheated steam atmosphere.

Specifications

Model	AF-µBF
Operation temperature (*1)	400 to 900°C
Uniform temperature zone	W200 × H200 × D400 mm
Available gases	Superheated steam, N2, Air, H2
Remaining O2 density (reference value)	20 ppm or less (when a muffle is filled with superheated steam.) Note: May vary depending on the amount of dissolved oxygen in the supplied water.
Applications	Debinding of electronic components (e.g.: MLCC, LTCC) BBO (Binder burn out) Debinding of ceramic parts Drying and degreasing of metal parts Removal of resin

*1 Value is for temperature at the space between the muffle and heater.