AllFit Inert Gas Oven with Superheated Steam
Our best-selling inert gas oven has been modified to perform heat treatment under a superheated steam atmosphere.
Features
- Shorter processing time is achieved by using superheated steam, which accelerates the debinding of ceramic components (e.g., MLCCs, LTCCs, electrostatic chucks) through hydrolysis of organic binders.
- Shortening the process time can reduce energy and gas consumption.
- Offering a wide range of equipment, from compact models for R&D to large-scale models for mass production.
- Designed with anti-condensation measures for heat treatment under a superheated steam atmosphere.
Specifications
| Model | AF-INH21 | AF-INH100 |
|---|---|---|
| Operation temperature | RT + 60 to 500°C | |
| External dimensions | W1485 × H1943 × D2090 mm | W1850 × H2425 × D2593 mm |
| Inner dimensions | W600 × H600 × D600 mm | W1000 × H1000 × D1000 mm |
| Available gases | Superheated steam, N2, Air | |
| Remaining O2 density (reference value) | 20 ppm or less (when a muffle is filled with superheated steam.)
Note: May vary depending on the amount of dissolved oxygen in the supplied water.
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