JTEKT Thermo Systems

JTEKT Thermo Systems Heat Treatment Technologies

We provide solutions to issues faced by our customers with heat treatment systems that are essential for the production of semiconductors, electronic components, FPD and other products.
We introduce our products here in six categories.

Semiconductor

We offer a lineup of vertical furnaces, horizontal furnaces, lamp annealing systems, and clean ovens that can be used in all kinds of semiconductor manufacturing.
They are used for power semiconductors (Si, SiC, GaN, others), sensors (MEMS, VCSEL, others), and packaging (Fan Out, others).
- Special Page for JTEKT Thermo Systems Vertical Furnaces
- Special page for Heat Treatment Equipment for Advanced Semiconductor Packaging
Electronic Component Manufacturing

From mass production conveyor furnaces to compact ovens, these products can meet needs in the production of MLCC/LTCC, inductors, batteries, magnetic materials, ceramic parts, and other electronic components.
We also offer heat treatment equipment with superheated steam for de-binding (BBO) of ceramic parts and electronic components such as MLCC , electrostatic chucks.
- Special Page for AllFit Heat treatment equipment with superheated steam
- Special Page for MLCC and LTCC Manufacturing Equipment

Solution Cases

See various customer problems and their solutions.

[case-011] CNT(Carbon nanotube) Growth System

CNT(Carbon nanotube) growth system for large diameter wafers
- Nitride, Oxynitride
- VF-1000(H)
[case-010] Improved Experimental and Development Accuracy

Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments
- Annealing
- VF-1000(H)
[case-009] Energy Saving of Vertical Furnace for Low Temperature Range

Improvement of vertical furnace to energy saving by optimizing thermal insulation design
- Polymide curing
- VF-3000(B)

Solution Cases List

News

October 27, 2025 General

Notice of Office Relocation – Kitakyushu Sales Office and Kitakyushu CS Branch Office (Japan)
August 04, 2025 Exhibition

On display at SEMICON Taiwan
April 21, 2025 Exhibition

On display at CERAMIC JAPAN (Osaka show)
March 19, 2025 Product

[Heat Treatment Equipment for Advanced Semiconductor Packaging] special introduction pages been added to the the website.
March 04, 2025 Exhibition

On display at SEMICON China

JTEKT Thermo Systems Heat Treatment Technologies

Solution Cases

[case-011] CNT(Carbon nanotube) Growth System

[case-010] Improved Experimental and Development Accuracy

[case-009] Energy Saving of Vertical Furnace for Low Temperature Range

News