Solution Cases [case-023]Vacuum Load-lock Transfer Unit for Ramp Annealing Systems
- Contact annealing
- RLA-4100V
Transfer system with vacuum load-lock improves product characteristics and throughput.
| Support Process | Contact annealing |
|---|---|
| Model Introduced | RLA-4106-V |
Problem
Ramp annealing systems with conventional N2 load-lock use a large amount of nitrogen
and require vacuuming of the process chamber for each treatment.
On the other hand, to improve product characteristics, there had been demand for
transfer system that can handle workpieces in extremely-low oxygen condition.
Solution
Equipped vacuum load-lock function as standard on the transport unit
Results
- Product characteristics were improved due to reduceing oxidation
- Throughput increased by 33%
