Solution Cases [case-023]Vacuum Load-lock Transfer Unit for Ramp Annealing Systems
- Contact annealing
Transfer system with vacuum load-lock improves product characteristics and throughput.
|Support Process||Contact annealing|
Ramp annealing systems with conventional N2 load-lock use a large amount of nitrogen
and require vacuuming of the process chamber for each treatment.
On the other hand, to improve product characteristics, there had been demand for
transfer system that can handle workpieces in extremely-low oxygen condition.
Equipped vacuum load-lock function as standard on the transport unit
- Product characteristics were improved due to reduceing oxidation
- Throughput increased by 33%