Solution Cases [case-015] Large Batch Type Clean Oven System
- Other
- SO2-12-F
Double the number of batches to improve productivity
| Support Process | Other(Back-end application) |
|---|---|
| Model Introduced | SO2-12-F |
Problem
The number of batches that can be stored in the heat treatment chamber was 25 wafers/chamber. Therefore, in order to increase the number of wafers to be processed, it is necessary to add a chamber, increasing the installation area and cost.
Solution
- Without increasing the footprint, we increased the capacity of the heat treatment chamber and doubled the number of batches that can be stored to 50 wafers/chamber.
Results
- Doubled the number of wafers that can be processed at one time, and improved productivity.
- Reduced initial cost and running cost.
