Solution Cases [case-015] Large Batch Type Clean Oven System

  • Other
  • SO2-12-F

Double the number of batches to improve productivity

Support Process Other(Back-end application)
Model Introduced SO2-12-F


The number of batches that can be stored in the heat treatment chamber was 25 wafers/chamber. Therefore, in order to increase the number of wafers to be processed, it is necessary to add a chamber, increasing the installation area and cost.


  • Without increasing the footprint, we increased the capacity of the heat treatment chamber and doubled the number of batches that can be stored to 50 wafers/chamber.


  • Doubled the number of wafers that can be processed at one time, and improved productivity.
  • Reduced initial cost and running cost.