Solution Cases [case-007] Increasing Yield by Reducing Contaminants Within the Furnace
- Polymide curing
- Resist curing
Reducing sediment with an automatic cleaning mechanism inside the furnace
|Support Process||Curing of organic material|
In organic treatment processes such as polyimide curing, sediments of organic by-products remain within the equipment, resulting in particle-related problems.
- We revised the structure by reviewing the gasses inside the furnace and reconfiguring the exhaust structure.
- We adopted a high-temperature burnout structure.
- This innovation reduced sediments of by-products, resulting in elimination of particles and improved yield.