Solution Cases [case-007] Increasing Yield by Reducing Contaminants Within the Furnace

  • Polymide curing
  • Resist curing
  • VF-5300(B)

Reducing sediment with an automatic cleaning mechanism inside the furnace

Support Process Curing of organic material
Model Introduced VF-5300(B)


In organic treatment processes such as polyimide curing, sediments of organic by-products remain within the equipment, resulting in particle-related problems.


  • We revised the structure by reviewing the gasses inside the furnace and reconfiguring the exhaust structure.
  • We adopted a high-temperature burnout structure.


  • This innovation reduced sediments of by-products, resulting in elimination of particles and improved yield.