Solution Cases [case-001] Improving the Quality of Process Development
- Nitride, Oxynitride
- VF-1000(H)
Eliminating problems in process development by going metal-free
| Support Process | Nitride・Oxynitride |
|---|---|
| Model Introduced | VF-1000(H) |
Problem
Metal ion contamination was discovered in a customer-owned experimental facility (vacuum purge-type heat treatment furnace). As a result, the customer encountered problems with process development.
Solution
- We performed a demonstration with our metal-free demonstration equipment and executed a trial run of the new process.
- We suggested the customer consider the Model VF-1000 with the metal-free spec; the customer purchased the product on our recommendation.
Results
- The new process was verified and development insights were gained during the demonstration.
- The customer was able to ship a sample of the purchased furnace, which created an opportunity for sale of the new product.
