Solution Cases [case-019]Reduction of wafer transfer errors

Wafer transfer error is reduced by enabling the choice of timing of wafer suction


When transporting the wafer, the wafer is lifted up and then suctioned.If grooves on the back side of the cassette were tapered, lifting the wafer before suction may get caught on the taper and the wafer may shift, which lead to transfer error and wafer damage.


By changing the controller, timing of wafer suction can be chosen, either before or after lifting the wafer.


The risk of equipment outage and wafer damage due to wafer transfer error are reduced.