Solution Cases [case-003] Reducing Initial Cost
- Activation
- VF-3000H
Providing SiC activation annealing equipment offering good value
| Support Process | Activation |
|---|---|
| Model Introduced | VF-3000H |
Problem
Equipment costs can be high because the SiC activation process requires extremely high temperatures (1,800°C).
Solution
- We sought to reduce the initial cost by developing equipment without vacuum support, which is the main reason for the high cost.
- We performed a demonstration with the demonstration unit and confirmed the viability of the process.
Results
- Through prior inspection during the demonstration, the customer was able to verify that the process proceeded with no problems.
- The specification of 50 wafers per batch and automatic transfer was achieved, which reduced the cost by 30% to 50% compared with conventional equipment.
